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Japan · Extreme Ultraviolet (EUV) Lithography · Reviewed 2026-10-15

Prof. Takeo Watanabe

World-renowned authority on EUV semiconductor lithography, researching resist materials and high-precision optics using the NewSUBARU synchrotron storage ring.

Official faculty profile ↗Research checked, not sponsored

Documented research interests and leadership

Research areas
Extreme Ultraviolet (EUV) Lithography, Synchrotron Radiation Nanofabrication, Soft X-Ray Surface Physics
Academic position
Director of the Laboratory of Advanced Science and Technology for Industry (LASTI)
Primary university source
Official directory entry ↗
Recruitment status
Not verified. Leadership profile does not imply active vacancies or assistantship availability.

Supervision and contact

Students interested in graduate or doctoral research supervision in Extreme Ultraviolet (EUV) Lithography, Synchrotron Radiation Nanofabrication, Soft X-Ray Surface Physics are advised to consult formal department application channels.

Important verification note

Facts reflect official university directory records reviewed 2026-10-15. Faculty recruitment and admissions require formal application.

Reviewed 2026-10-15 · Editorial standards · Report an issue